Dielectric-on-Dielectric Achieved on SiO2 in Preference to W by Water-free Chemical Vapor Depositions with Aniline Passivation.
ACS Applied Materials & Interfaces（2023）
关键词
water-free oxide deposition,area-selective pulsed chemicalvapor deposition,hafnium tert-butoxide,aluminum-tri-sec-butoxide,titaniumisopropoxide,aniline selective passivation
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要