AlGaN films grown by reactive magnetron sputtering on glass substrates with different Al content

Isabela Machado Horta,Barbara Souza Damasceno, Regiane Santana de Oliveira,André Luis de Jesus Pereira,Marcos Massi, Argemiro Soares da Silva Sobrinho,Douglas Marcel Gonçalves Leite

Surfaces and Interfaces（2023）

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摘要

•Sputtering technique as a cost-effective process to obtain AlGaN films.•Different Al content in AlGaN films using reactive magnetron sputtering system.•Fine control of Al content through target power ratio.•Homogeneous phase and c-axis oriented AlGaN films.•Bandgap variation with composition in AlGaN films.

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关键词

GaN,AlGaN,sputtering,Glass,Thin film,Semiconductor

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