Excellent Surface Passivation of P-Type TOPCon Enabled by Ozone-Gas Oxidation with a Single-Sided Saturation Current Density of ∼ 4.5 Fa/cm2
SOLAR ENERGY（2023）
关键词
Ozone gas(O-3) oxidation,p-Type TOPCon,Boron-doped polysilicon,Passivation quality,PECVD
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