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Optimization and Fabrication of MEMS Based Piezoelectric Acoustic Sensor for Wide Frequency Range and High SPL Acoustic Application

Ashish Kumar,Arathy Varghese,Girraj Sharma,Manish Kumar, Gaurav K. Sharma,Mahanth Prasad,Vijay Janyani,R. P. Yadav,Khaled Elgaid

MICRO AND NANOSTRUCTURES（2023）

Cited 1|Views10
Key words
Si-diaphragm,Microtunnel,FEM,LEM,Piezoelectricity,Acoustic sensor
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