Fabrication of infrared detector with monolithic microlens produced in thermal reflow process

J. Chrzanowska-Giżyńska, O. Ślęzak,P. Nyga, M. Wankiewicz

Infrared Physics & Technology(2023)

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摘要
•Development of sub-millimeter base diameter immersion lenses in GaAs for group III-V infrared detectors.•Fabrication process results in lenses with accurate dimensions (330 ± 10 µm clear aperture and 78 ± 6 µm height).•Integration of microlens with the IR detector leads to a three-fold increase in the detector's detectivity.•Uncooled detectors with enhanced detectivity and signal-to-noise ratio achieved through the use of an immersion lens.
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关键词
Microlens, Thermal reflow, InAsSb, MBE, Infrared detector, Detectivity, III-V detector
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