Laser microstructuring of extremely-thin vapor chamber with hybrid configuration for excellent heat dissipation

•Three-region hybrid configuration for extremely-thin vapor chambers was proposed.•Different micro/nano structures were designed and fabricated for three regions.•A short-pulse laser microstructuring approach was developed to fabricate VCs.•Effective thermal conductivity of 12032 W/(m⋅K) was reached for 0.22-mm-thick VC.