Epitaxial growth of NbN thin films for electrodes using atomic layer deposition

Seo Young Jang,Hye Min Lee,Ju Young Sung,Se Eun Kim, Jae Deock Jeon,Yewon Yun, Sang Mo Moon,Joung Eun Yoo,Ji Hyeon Choi,Tae Joo Park,Sang Woon Lee

Applied Surface Science（2023）

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摘要

•Epitaxial growth of NbN thin films using atomic layer deposition.•An in-plane compressive strain in the NbN film grown on MgO substrates.•50% reduced resistivity owing to an enhanced carrier mobility.•Plausible mechanism in the growth of epitaxial NbN films.

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关键词

Metal thin film, NbN, Epitaxy, Atomic layer deposition, Lattice matching

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