Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Thin Film Deposition Research and Its Impact on Microelectronics Scaling

Cyril Cabral,Christian Lavoie,Conal Murray,Adam Pyzyna, Ken Rodbell

Journal of Vacuum Science &amp Technology A Vacuum, Surfaces, and Films（2020）

Cited 5|Views2
Key words
Thin Film Growth,Strained-Silicon Technology,CMOS Scaling
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined