Design and Fabrication of Soft X ray Suppermirrors

Abstract W/Si, Ir/SiC, and Pt/C supermirrors were designed by block method and fabricated by magnetron sputtering method. The glancing incident angles are 1.0, 1.4 and 1.7 degree. Pt/C supermirrors show better spectral results than W/Si, Ir/SiC. Pt/C supermirrors also have good angular tolerance, which will benefit opt-mechanic alignment. In addition, Pt layer as outmost one can withstand harsh space environment.