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Nanosecond-laser Hyperdoping of Intrinsic Silicon to Modify Its Electrical and Optical Properties

G. Y. Dong,H. W. Yang,S. J. Zeng,Z. Q. Shi,Y. J. Ma,C. Wen,W. B. Yang

Optics & Laser Technology（2023）

Cited 1|Views0
Key words
Hyperdoping,Laser processing,Electrical transport,Optical property,Microstructure-property relationship,Doping mechanism
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