High-Voltage β-Ga2O3 RF MOSFETs With a Shallowly-Implanted 2DEG-Like Channel
IEEE Electron Device Letters(2023)
摘要
We report radio-frequency (RF) MOSFETs with a two-dimensional-electron-gas-like (2DEG-like) channel formed at the
$\beta $
-Ga
2
O
3
surface through the low-energy implantation of Si and rapid thermal activation process. The shallowly implanted channel exhibits a strong electron confinement near surface with a high sheet concentration of
${3}.{2}\times {10} ^{{13}}$
cm
−3
. With the high scaling of gate length (
${L}_{\text {G}}{)}$
, the current cut-off frequency (
${f}_{\text {T}}{)}$
and maximum oscillation frequency (
${f}_{\text {max}}{)}$
were inversely proportional to
${L}_{\text {G}}$
along with a high electron saturation velocity of
${2}.{7}\times {10} ^{{6}}$
cm/s. The device with a
${L}_{\text {G}}$
of
$0.15 ~\mu \text{m}$
demonstrates a high
${f}_{\text {T}}$
of 29 GHz and
${f}_{\text {max}}$
of 35 GHz, whilst preserving the high-voltage operation capability with a drain-to-source breakdown voltage (
$BV_{\text {DS}}{)}$
of 193 V. RF performance was verified by the power amplifying capability with a maximum power gain of 7 dB at 2 GHz for the device with
${L}_{\text {G}}$
of
$0.5~\mu \text{m}$
.
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关键词
rf mosfets,high-voltage,shallowly-implanted,deg-like
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