Microfabrication of dielectric resonators with Q-factor exceeding 5 billion

Naijun Jin,David Mason,Yizhi Luo,Prashanta Kharel,Andrei Isichenko,Daniel J. Blumenthal,Scott B. Papp,Peter T. Rakich

Frontiers in Optics + Laser Science 2022 (FIO, LS)（2022）

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摘要

We demonstrate a new method to fabricate arrays of micro-Fabry-Pérot resonators supporting Q-factors as high as 5 Billion and highly tailorable resonator geometries to serve applications ranging from frequency metrology to nonlinear optics.

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