Monolithic heterogeneous integration of PbS colloidal quantum dot photodiode on silicon nitride

Chao Pang,Yu-Hao Deng, Ezat Kheradmand,Robin Petit,Lukas Elsinger,Christophe Detavernier,Pieter Geiregat,Zeger Hens,Dries Van Thourhout

Frontiers in Optics + Laser Science 2022 (FIO, LS)（2022）

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摘要

Monolithic integration of PbS colloidal quantum dot photodiodes on silicon nitride waveguides is demonstrated for the first time. Waveguide width and top cladding thickness are designed to meet the low saturation threshold of optical power.

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silicon nitride

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