Position-Sensitive Measurements of a Single-Mode Laser Beam Spot Using the Dividing Plate Method

New position-sensitive experimental results have been obtained using the Dividing Plates method to detect the displacement of a single-mode laser beam spot of various diameters. Measurements show that with this method it is possible to attain sensitivities down to 0.18 µm –1 for a laser beam spot diameter of 8.8 µm displaced over 2.4 µm diameter zone, defined as the area where measurements non-linearities are within 1%. The achievable measurement accuracy is limited by ADC noise and corresponds to ±0.030 nm. Application of the Dividing Plates method for position-sensitive measurements allows to build a compact version of the Precision Laser Inclinometer, the Compact PLI, with reduced overall dimensions of 20 × 20 × 20 cm 3 and weight of approximatively 10 kg.