Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis
Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)（2022）
关键词
optical depth measurement,polarization,microgrooves,self-interferometry,near-field
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要