Mid-infrared Broadband Spectroscopy for Plasma Analysis

R. Krebbers, N. Liu, K. E. Jahromi, M. Nematollahi, O. Bang, G. Woyessa, C. R. Petersen,G. van Rooij,F. J. M. Harren, A. Khodabakhsh, S. M. Cristescu

Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)（2022）

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摘要

We demonstrate the application of a home-built Fourier Transform Spectrometer based on a mid-infrared supercontinuum source for multispecies detection in a plasma reactor. The results show the high capability of the system for plasma analysis.

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关键词

broadband spectroscopy,plasma analysis,mid-infrared

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