Hybrid resonance metasurface for a lithium niobate electro-optical modulator

Electrically tunable metasurfaces can realize two-dimensional pixelated spatial light modulation and have a wide range of applications in optical switching, free-space communication, high-speed imaging, and so on, arousing the interest of researchers. Here, a gold nanodisk metasurface on a lithium-niobate-on-insulator (LNOI) substrate is fabricated and experimentally demonstrated as an electrically tunable optical metasurface for transmissive free-space light modulation. Using the hybrid resonance formed by the localized surface plasmon resonance (LSPR) of gold nanodisks and the Fabry–Perot (FP) resonance, the incident light is trapped in the gold nanodisk edges and a thin lithium niobate layer to realize field enhancement. In this way, an extinction ratio of 40% is achieved at the resonance wavelength. In addition, the proportion of hybrid resonance components can be adjusted by the size of the gold nanodisks. By applying a driving voltage of ± 2.8 V, a dynamic modulation of 135 MHz is achieved at resonant wavelength. The highest signal-to-noise ratio (SNR) is up to 48 dB at 75 MHz. This work paves the way for the realization of spatial light modulators based on CMOS-compatible LiNbO3 planar optics, which can be used in lidar, tunable displays, and so on.