A Numerical Study on Crystal Defects in Elliptical Vibration Cutting of Single-Crystal Silicon by Molecular Dynamics Simulation
SSRN Electronic Journal（2022）
关键词
elliptical vibration cutting,molecular dynamics,crystal defects,silicon,single-crystal
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要