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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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Impact of Cation Vacancies on Leakage Current on TiN/ZrO2/TiN Capacitors Studied by Positron Annihilation

Akira Uedono,Naomichi Takahashi,Ryu Hasunuma,Yosuke Harashima,Yasuteru Shigeta,Zeyuan Ni,Hidefumi Matsui,Akira Notake,Atsushi Kubo,Tsuyoshi Moriya,Koji Michishio,Nagayasu Oshima,Shoji Ishibashi

2022 International Symposium on Semiconductor Manufacturing (ISSM)（2022）

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