Fourier surface grating couplers for integrated photonics
Optica Advanced Photonics Congress 2022(2022)
摘要
We incorporate Fourier surfaces into silicon waveguides with vertical tapers for next-generation photonic grating couplers. By combining thermal scanning-probe lithography and reactive-ion etching, we generate gratings with smoothly apodized depth profiles and multi-wavelength coupling functionality.
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