Effect of carbon cathode plasma parameters on the structure and properties of deposited coatings

The results of studying the structure and mechanical properties of the coatings deposited with the use of a pulsed carbon cathode-arc plasma in vacuum are presented. An original technique for evaporating a graphite cathode under the influence of a pulsed discharge with a variable structure (shape, amplitude, and pulse duration) has been developed. The generation parameters of pulsed cathode plasma have been determined, at which carbon diamond-like coatings with higher mechanical properties are formed.