Performance Analysis of On-Chip Coupled Piezo/Photodiodes, a Numerical Study

We are presenting a numerical approach to calculate the mechanical efficiency of piezo-photomotion devices, which consist of piezoelectric actuators, integrated with silicon solar cells. Such devices provide conversion of optical energy to mechanical energy and pave the way for remote-controlled micro and nanorobots. We demonstrate that the mechanical efficiency is almost independent of the input voltage and can reach 0.06% under a simple point force load, when the backside etching of the silicon substrate, i.e. the diaphragm is 8 mm in diameter and 30 µm in thickness. This study offers guidelines for future design improvements.