A Reverse Electrowetting-On-Dielectric (Rewod) Energy Harvester Using Nonwetting Gallium Coated Electrode And Ultrathin Gallium Oxide Shell As Dielectric Layer

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)(2023)

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摘要
We report a method of REWOD energy harvesting using a bumpy formation of gallium coated (similar to 20 nm) electrode as a nonwetting surface and utilizes naturally formed oxide shell of gallium (similar to 3 nm) as a dielectric layer, while using naturally oxidized Galinstan as a conductive liquid. Compared with Cytop and Parylene-C coated flat electrodes, all liquid metal based energy harvester was able to generate continuous power without wetting on the surface. Maximum power generation of 268 mu W was achieved when the gap between two electrodes was 4.5 mm, 7 Vpp and 65 Hz applied to a woofer.
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关键词
REWOD,liquid metal,gallium oxide,energy harvest
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