A Reverse Electrowetting-On-Dielectric (Rewod) Energy Harvester Using Nonwetting Gallium Coated Electrode And Ultrathin Gallium Oxide Shell As Dielectric Layer
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)(2023)
摘要
We report a method of REWOD energy harvesting using a bumpy formation of gallium coated (similar to 20 nm) electrode as a nonwetting surface and utilizes naturally formed oxide shell of gallium (similar to 3 nm) as a dielectric layer, while using naturally oxidized Galinstan as a conductive liquid. Compared with Cytop and Parylene-C coated flat electrodes, all liquid metal based energy harvester was able to generate continuous power without wetting on the surface. Maximum power generation of 268 mu W was achieved when the gap between two electrodes was 4.5 mm, 7 Vpp and 65 Hz applied to a woofer.
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关键词
REWOD,liquid metal,gallium oxide,energy harvest
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