Thermal Conductivity Detector (Tcd)-Type Gas Sensor Based on the Suspended 1D Nanoheater for IoT Applications
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS（2023）
关键词
Thermal conductivity detector (TCD),Gas sensor,Pulse-width modulation,Suspended architecture,C-MEMS
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要