120 Ppm Quality Factor Thermal Stability from -40 ℃ to +60℃ of a Dual-Axis MEMS Gyroscope Based on Joule Effect Dynamic Control
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS（2023）
Key words
MEMS gyroscope,Quality factor tuning,Joule effect
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