The fabrication of a self-aligned multi-waveguide-layer passive Si3N4/SiO2 photonic integrated circuit for a 3-D optical phased array deviceDachuan Wu, Kevin Owen,Bowen Yu,Yasha YiOptical Materials Express（2022）引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
