Integration of microbattery with thin-film electronics for constructing an integrated and transparent microsystem based on InGaZnO

Abstract Transparent electronics hold promising applications in emerging consumer electronics. A full integration of miniaturized transparent energy device (lithium-ion battery, LIB), electronic device (thin-film transistor, TFT)) and sensing device (photodetector, PD) to form a monolithic integrated microsystem greatly enhances the functions of transparent electronics. However, an integrated transparent microsystem including all the above-mentioned devices has not been realized. In this work, InGaZnO (IGZO) is explored to prepare the above devices and microsystem due to its multifunctional and outstanding properties. A transparent LIB with IGZO as the anode is first proposed as the on-chip power source. Then, TFT with IGZO as the channel and PD with IGZO as the photosensitive are also prepared on the same substrate for constructing an integrated transparent microsystem. Each device displays acceptable performance, including that: LIB shows a specific capacity of 9.8 µAh cm-2; TFT displays a carrier mobility of 3.3 cm2 V-1 s-1; PD shows a responsivity of 0.35 A W-1. Moreover, AC signals can be successfully charged into LIB by using TFT as the on-chip rectifier and also the PD works well by using the charged LIB as the on-chip power, demonstrating collaborative capabilities of each device to achieve systematical function.