High-resolution alpha-particle detector based on Schottky barrier 4H-SiC detector operated at elevated temperatures up to 500 °C

Applied Surface Science(2023)

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摘要
•We fabricated α-particle Schottky barrier detectors based on a high-quality 4H-SiC epitaxial layer.•The detectors were tested at temperatures up to 500 °C.•Their reverse current rose from 1 pA at room temperature to 10 nA at 500 °C.•Their energy resolution worsened only by 20% compared with that at room temperature.
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关键词
detector,high-resolution,alpha-particle,h-sic
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