Fabrication method of high energy beam for solid-state nanopore

Solid-state nanopores have drawn the interest of numerous researchers due to their excellent mechanical properties, stability, and shape control, which have demonstrated tremendous potential in gene detection, protein detection, energy conversion, material separation, and water purification. And shape-controlled and efficient solid-state nanopore manufacturing technology is the prerequisite for the application of solid-state nanopore. At present, the high energy beam manufacturing method has the advantages of high efficiency, high precision and high manufacturing controllability among the conventional solid state nanopore manufacturing methods. This paper provides an overview of four solid state nanopore fabrication methods including high energy electron beam, focused ion beam, laser etching and ion track etching and their fundamental principles. The benefits and drawbacks of these methods, as well as their feasibility for large-scale controlled fabrication are discussed.