A novel high-efficiency microwave plasma multi-ridges field compressed reactor

PHYSICS OF PLASMAS(2023)

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摘要
Traditional tapered waveguide devices are limited by their power efficiency and produce unstable plasmas and small reaction zones. To overcome these drawbacks, a multi-ridge field compressed reactor operating at a frequency of 2.45 GHz is designed in this paper. The finite element method is applied to numerically compute its properties. A coupling model for the multiple physical fields is introduced to simulate the transient processes of a microwave argon plasma. Experiments with different flow rates and power settings are performed. This novel device can both sustain a long-length plasma and increase the power transfer efficiency from microwave to air and to the argon plasma, respectively, to 97.4% and 95.2%. Moreover, both devices are used to process the degradation of ethanol and benzene. The removal efficiencies are increased by 38.8% and 73.8% for ethanol and benzene, respectively, in the novel waveguide compared with the tapered waveguide.
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关键词
plasma,microwave,high-efficiency,multi-ridges
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