Effects of Nitrogen Flow Rate on the Microstructure and Mechanical and Tribological Properties of TiAlN Films Prepared Via Reactive Magnetron Sputtering
CERAMICS INTERNATIONAL（2023）
Key words
Ceramic films,N2 flow rate,Microstructure,Mechanical properties,Tribological behavior
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined