Angular distribution of sputtered particles from Inconel718, a Simulation Study

The angular distribution of sputtered particles is an effective tool for obtaining information on the composition and structure of the target and even on the beam energies. The particles of Inconel718 super alloy sputtered at full angle corresponding to each of the probes were calculated. The SRIM program associated with a new ANGULARE simulation program was used to obtain the sputtering yields and angular distribution of sputtered Fe, Al, Cr, Mo, Nb, Ni and Ti particles from Inconel718. The simulation was performed for a large number of incident ions (5 keV, Kr+) and allows the computer to count the number of particles emitted at the solid angle. Angular distributions of pulverized Inconel718 particles and pulverized yields were compared to the literature. Furthermore, the angular distribution of Inconel718 for the differential sputtering yields shows an under-cosine tendency.