An Active Visible-Light Integrated Photonics Platform on 200-mm Si.

Wesley D. Sacher,Yiding Lin,Hong Chen,Saeed S. Azadeh,Zheng Yong,Xianshu Luo,Hongyao Chua,Jason C. C. Mak,Alperen Govdeli,Ankita Sharma,Jared C. Mikkelsen,Xin Mu,Andrei Stalmashonak,Guo-Qiang Lo,Joyce K. S. Poon

OFC（2023）

引用 0|浏览24

暂无评分

摘要

We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445–640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.

查看译文

关键词

active visible-light integrated photonics platform,foundry-fabricated monolithically integrated photonics platform,silicon nitride waveguides,silicon photodiodes,size 445.0 nm to 640.0 nm,visible spectrum

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要