Gas-Jet Synthesis of Diamond Coatings from a H 2 +CH 4 +Ar Mixture Activated in a Microwave Discharge
Doklady Physics(2023)
摘要
In this study, a gas-jet diamond synthesis method using a high-speed jet for the transportation of gases activated in microwave plasma of gases to a substrate was developed. Diamond was synthesized in a hydrogen–methane–argon mixture. The diamond synthesis rate (130 µm/h) exceeded the rate attained in earlier gas-jet experiments with activation in microwave plasma without argon additions.
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关键词
diamond, gas-phase synthesis, microwave plasma, gas-jet deposition
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