Optimizing metal/n-AlGaN contact by recessed AlGaN heterostructure with polarization effect

Yuxuan Chen,Ke Jiang,Xiaojuan Sun,Zi-Hui Zhang,Shanli Zhang,Jianwei Ben,Bingxiang Wang,Long Guo,Dabing Li

Nanoscale Advances（2023）

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摘要

With an increasing Al mole fraction, n-contact has become an important issue limiting the development of Al-rich AlGaN-based devices. In this work, we have proposed an alternative strategy to optimize...

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