Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method
Microsystems & Nanoengineering（2023）
摘要
[This corrects the article DOI: 10.1038/s41378-023-00532-0.].
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关键词
silicon,nanopores/nanoslits,controllability,single-crystal,fast-stop,current-monitored
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