Fabrication of Flexible Metglas Based Magnetic Energy Harvester using PVDF-TrFE/KNN Composite Film

2022 IEEE International Conference on Emerging Electronics (ICEE)(2022)

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摘要
This article presents a novel double-clamped beam-based low-cost flexible magnetic energy harvester fabricated on a metglas substrate using the polyvinylidene fluoride trifluoro ethylene/potassium sodium niobate (PVDF-TrFE/KNN) composite film. The composite film is deposited using the spin coating method on the metglas substrate and has piezoelectric coefficient of 107 pm/V. The double-clamped beam-based flexible magnetic energy harvester (MEH) is fabricated using a simple process of deposition, shadow masking, and laser cutting technique. The fabricated MEH has two microcantilevers with a common rectangular-proof mass. The fabricated harvester is tested using the magnetic field characterization setup with varying frequencies. It is found that the maximum generated voltage is 400 mV with the magnetic coil filed of 1 Oe and 0.5 Ampere current through coil. The maximum power generated from the fabricated flexible MEH is 1.1 µW at the restive load of 2 kΩ, which is a better result than a similarly reported harvesters.
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关键词
PVDF-TrFE/KNN,Magnetic Energy Harvester,Microcantilevers,Metglas. Flexible,Double Claimed Beam
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