Suppression of grain boundary contributions on carrier mobility in thin Al-doped ZnO epitaxial films

Realizing very thin transparent conductive (TCO) films is a key aspect of many applications, but often the film quality tends to worsen at very small thicknesses. In this work we demonstrate that Al-doped ZnO (AZO) thin films grown epitaxially on SrTiO3 retain their optimal properties even at thicknesses as low as 30 nm. We deposit by radio frequency magnetron sputtering and investigate the film morphology, structure, crystallinity, electrical and optical properties. We prove that the Hall mobility of epitaxial films is limited mostly by ionized impurity scattering, with a negligible contribution of grain boundary scattering, leading to comparably high mobility in thin epitaxial films. On the contrary, in polycrystalline films the properties of AZO films strongly deteriorate at reduced film thickness, due to grain boundary contributions. The optical carrier density and mobility do not change significantly between epitaxial and polycrystalline films, suggesting that the different electrical prop-erties are indeed mainly due to grain boundary scattering and not to a reduction of carriers and intrinsic mobility. In this way we obtain an epitaxial thin TCO film with the optimal properties of a bulk by a scalable technique, paving the way to applications in plasmonic devices and in thin films solar cells.