Buried-Electrode Hybrid Bonded Thin-Film Lithium Niobate Electro-Optic Mach-Zehnder Modulators
IEEE Photonics Technology Letters(2023)
摘要
Hybrid bonded silicon nitride thin-film lithium niobate (TFLN) Mach-Zehnder modulators (MZMs) at 1310 nm were designed with metal coplanar waveguide electrodes buried in the silicon-on-insulator (SOI) chip. The MZM devices showed greatly improved performance compared to earlier devices of a similar design, and similar performance to comparable MZM devices with gold electrodes made on top of the TFLN layer. Both devices achieve a 3-dB electro-optic bandwidth greater than 110 GHz and voltage-driven optical extinction ratios greater than 28 dB. Half-wave voltage-length products (
$\text{V}\pi \text{L}$
) of 2.8 and 2.5
$\text{V}\cdot $
cm were measured for the 0.5 and 0.4 cm long buried metal and top gold electrode MZMs, respectively.
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关键词
Lithium niobate,modulator,electro-optic,thin-film,electrode,silicon-on-insulator,hybrid integrated circuits
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