PHIDL: Python CAD layout and geometry creation for nanolithography.Adam N. McCaughan, A. M. Tait,Sonia M. Buckley, D. M. Oh, J. T. Chiles,Jeffrey M. Shainline,Sae Woo NamCoRR(2021)引用 0|浏览11暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要