自动和半自动探针台的载片台水平位移测量方法研究
Journal of Astronautic Metrology and Measurement（2023）
Abstract
为解决自动和半自动探针台的载片台水平方向位移发生偏差时,导致探针压点位置不准,从而使测试结果不可靠,甚至伤及芯片和探针的问题.根据实际工艺和溯源机构的标准器具特性,设计了标准尺的图形,在苏打玻璃上电镀5μm宽的金线条,制作成152.4 mm×20 mm的长方形标准尺,其测量范围为(0～150)mm.对标准尺进行了定标,定标不确定度为1.0μm.在测量范围内,进行了试验分析,评定了测量不确定度.结果表明:标准尺测量的水平位移偏差小于4μm,满足测试需求.
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