Magnetic and structural properties of sputtered thick Co2FeSi alloy films

•The largest effective saturation magnetization of 846 emu/cm3 is achieved in the CFS films after annealing.•Thickness dependent in-plane uniaxial anisotropy is determined to be in the range of 103–104 erg/cm3.•A cubic magnetic anisotropy is observed to develop with annealing or sputtering power.•The correlations between magnetic anisotropy and film thickness/structural ordering are provided.