订阅小程序
旧版功能

Asynchronous Pulse-Modulated Plasma Effect on the Generation of Abnormal High-Energetic Electrons for the Suppression of Charge-Up Induced Tilting and Cell Density-Dependent Etching Profile Variation

Hyoungcheol Kwon,Felipe Iza,Imhee Won, Minkyung Lee,Songhee Han, Raseong Park,Yongjin Kim,Dongyean Oh,Sung-Kye Park,Seonyong Cha

PHYSICS OF PLASMAS（2023）

引用 0|浏览19
关键词
Plasma Etching,Electron Energy Distribution Function
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要