Wettability and corrosion resistance of zirconium nitride films obtained via reactive high-power impulse magnetron sputtering

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A(2023)

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摘要
One of the main problems in ships is corrosion, which reduces the lifetime usage of ship parts and increases maintenance costs. Ceramic coatings can contribute to solving this situation. Zirconium nitrides obtained by reactive unbalanced magnetron sputtering technology are largely reported as coatings with high corrosion resistance. The present study used high-power impulse magnetron sputtering in a reactive atmosphere (R-HiPIMS), varying the nitrogen amount. SEM, EDS, XRD, AFM, and contact angle measurements were used to assess the obtained coatings' performance. Corrosion resistance was evaluated using electrochemical impedance spectroscopy (EIS) (up to 168 h exposure) and potentiodynamic polarization (PP) in NaCl (3.5% wt.- "artificial seawater ") solution. According to the results, cross section micrographs showed strong densification of ZrN films regardless of the nitrogen amount. Besides, nitrogen increases during deposition influenced the drop of applied peak power (P-p) to the target and, consequently, influenced other film properties, such as roughness, wettability, and corrosion resistance. PP and EIS tests demonstrate the protective behavior of films under artificial seawater exposure. The results prove that the implementation of HiPIMS technology to obtain ZrN films could contribute to increasing the corrosion resistance of coated ship metallic parts and, hence, help maritime transportation to reduce maintenance time and cost.
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关键词
corrosion resistance,zirconium,nitride films,high-power
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