Carbon Ion Self–sputtering Attained by Sublimation of Hot Graphite Target and Controlled by Pulse Injection of a Neon–helium Gas Mixture
Applied Surface Science（2023）
Key words
Hot graphite cathode,Self-sputtering action,Gas injection magnetron sputtering,Diamond-like carbon (DLC),Carbon-silicon carbide (C-SiC),Hardness results
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined