Multiple-beam grating interferometry and its general Airy formulae

Optics and Lasers in Engineering(2023)

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摘要
•Establishment of the multiple-beam interferometry based on diffraction grating.•Theoretical derivation of the enhanced Airy formulae considering optical Doppler frequency shifts from laser wavelength and grating pitches.•Potential of two-degree-of-freedom displacement measurement by all-fiber modulated grating interferometry.
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关键词
Multiple-beam interferometry,Grating interferometry,Airy formulae,Displacement measurement
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