Calibration of residual polarization in light source for broadband rotating polarizer spectroscopic ellipsometer

Ming Gong,Honggang Gu,Chao Chen,Jun Chen,Weiqi Li,Chuanwei Zhang,Shiyuan Liu

Thin Solid Films（2023）

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摘要

•The residual polarization in light source impacts the calibration of rotating polarizer spectroscopic ellipsometer (RPSE).•A three-step method is proposed to calibrate the residual polarization in light source of RPSE.•A homemade broadband RPSE covering 193∼1000 nm range is set up.

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关键词

Spectroscopic ellipsometry,Rotating polarizer,Residual polarization,Calibration

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