Defect structures as a function of ion irradiation and annealing in LiNbO3

Eric Lang,Thomas Beechem,Anthony McDonald, Tom Friedmann,Roy H. Olsson, Jeffrey O. Stevens,Blythe G. Clark,Khalid Hattar

Thin Solid Films（2023）

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摘要

•Ion implantation in lithium niobate creates defects suitable for device fabrication.•H, He, and N implantation from 150 keV to 2 MeV varies defect structures.•Suitable defects for film fracture achieved with helium implantation and annealing.

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关键词

Lithium niobate,Ion beam modification,Transmission electron microscopy,Raman spectroscopy

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