High-speed multiparametric imaging through off-resonance tapping AFM with active probe

•Off-resonance tapping (ORT) mode of AFM is widely concerned due to its advantages of weak tip-sample interaction and concurrent quantitative property mapping.•ORT-AFM has the disadvantage of slow scan speed caused by low modulation frequency.•Active probe actuates the cantilever directly, and thus increase modulation frequency in ORT-AFM.•High-speed multiparametric imaging with the active probe method in ORT-AFM is provided.