Insights on Film Growth Conditions on a Floating Substrate During Reactive Ar/O2 Bipolar High Power Impulse Magnetron Sputter Deposition
Journal of Physics D Applied Physics（2023）
Key words
reactive magnetron sputtering,bipolar HiPIMS,titanium dioxide,substrate current,insulating substrate,glass
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined